Processes and Technology

Microstructuring, also named micro lithography, calls for the command of series of complex process steps. After a careful cleaning the substrate material (glass, ceramics and metals) will be coated. Then the coating gets the desired structure by different, predominantly automated procedures. Thereby we use technologies from the semiconductor industry for a lot of processes.

For the structuring the following procedures will be used - depending on requirements or materials:

  • Masking method
  • Lift-off process
  • Etching procedure (wet or dry etching)
The high-precision photo and chrome masks can be prepared in different manufacturing versions:

  • Electron beam lithography
  • Laser lithography
  • Mask replication
  • Photo lithographical processing
  • Structures on special substrates

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